Semiconductor device and manufacturing method thereof

ABSTRACT

A semiconductor device including a first integrated circuit component, a second integrated circuit component, a third integrated circuit component, and a dielectric encapsulation is provided. The second integrated circuit component is stacked on and electrically coupled to the first integrated circuit component, and the third integrated circuit component is stacked on and electrically coupled to the second integrated circuit component. The dielectric encapsulation is disposed on the second integrated circuit component and laterally encapsulating the third integrated circuit component, where outer sidewalls of the dielectric encapsulation are substantially aligned with sidewalls of the first and second integrated circuit components. A manufacturing method of the above-mentioned semiconductor device is also provided.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional application of U.S. application Ser.No. 16/171,343, filed on Oct. 25, 2018. The prior application Ser. No.16/171,343 claims the priority benefits of U.S. provisional applicationSer. No. 62/714,086, filed on Aug. 3, 2018. The entirety of each of theabove-mentioned patent applications is hereby incorporated by referenceherein and made a part of this specification.

BACKGROUND

Currently, the three-dimensional integrated circuit (3D-IC) componentsare widely developed in semiconductor packaging in which multiplesemiconductor dies are stacked upon one another, such aspackage-on-package (PoP) and system-in-package (SiP) packagingtechniques. Some of the benefits of 3D-IC components, for example,include exhibiting a smaller footprint, reducing power consumption byreducing the lengths of signal interconnects, and improving yield andreducing fabrication cost. As semiconductor technologies furtheradvance, bonding technology for chip-to-wafer bonding or wafer-to-waferbonding is utilized in fabrication of 3D-IC components. For example, inwafer-to-wafer bonding technology, various methods have been developedto bond two package components (such as wafers) together. Hybrid bondingis one type of bonding technology for 3D-ICs, where two semiconductorwafers are bonded together using a hybrid bonding technique.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 7 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure.

FIG. 8 is a schematic cross-sectional view showing an application of asemiconductor device according to some exemplary embodiments of thepresent disclosure.

FIGS. 9 through 13 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure.

FIGS. 14 through 18 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure.

FIGS. 19 through 22 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIGS. 1 through 7 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure. Referring to FIG.1 , a plurality of semiconductor dies or integrated circuit components200 are bonded with a first semiconductor wafer W1. The bonding may beperformed at the die-to-wafer level. Alternatively, the bonding may beperformed at the die-to-die level or wafer-to-wafer level as will bedescribed later herein.

In some embodiments, the first semiconductor wafer W1 includes a firstsubstrate 1100, a first interconnection layer 1200 formed over the firstsubstrate 1100, a first dielectric layer 1300 formed over the firstinterconnection layer 1200, and a plurality of first conductiveconnectors 1400 embedded in the first dielectric layer 1300. The firstsubstrate 1100 may be a semiconductor substrate, such as a bulksemiconductor or the like, which may be doped (e.g., with a p-type or ann-type dopant) or undoped. The first substrate 1100 may be a siliconwafer. Other suitable substrates, such as a multi-layered substrate(e.g., a semiconductor-on-insulator (SOI) substrate), a gradientsubstrate, or the like, may also be used. The semiconductor material ofthe first substrate 1100 may include silicon, germanium, a compoundsemiconductor (e.g., silicon carbide, gallium arsenic, galliumphosphide, indium phosphide, indium arsenide, etc.), an alloysemiconductor, or combinations thereof. A wide variety of electricalcomponents (e.g., transistors, capacitors, resistors, combinations ofthese, and the like) may be used to generate the structural andfunctional requirements of the design for the first substrate 1100. Insome embodiments, the first substrate 1100 is free of throughsemiconductor vias depending on the design requirements. In alternativeembodiments, through semiconductor vias are formed in the semiconductorsubstrate of wafer as will be described later herein. In someembodiments, the first interconnection layer 1200 includes a pluralityof first conductive patterns 1210 embedded in a first dielectricmaterial 1220. The first interconnection layer 1200 may be referred toas the inter-metallization dielectric (IMD) layer(s). In someembodiments, the first conductive conductors 1400 are embedded in thefirst dielectric layer 1300. The first conductive conductors 1400 mayinclude conductive pads electrically coupled to the first substrate 1100through the first interconnection layer 1200. In some embodiments, thematerial of the first conductive conductors 1400 includes metallicmaterial (e.g., a metal or a metal alloy such as copper, silver, gold,tungsten, cobalt, aluminum, or alloys thereof). The first dielectriclayer 1300 may provide a degree of protection for the underlyingstructures. For example, the first dielectric layer 1300 can be formedof silicon oxide, silicon nitride, silicon oxy-nitride, low-kdielectrics, combinations thereof, or the like. In some embodiments, atleast a portion of the first conductive conductors 1400 are revealed bythe first dielectric layer 1300. The top surfaces of the firstconductive conductors 1400 and the top surface of the first dielectriclayer 1300 may be substantially level. In some embodiments, the topsurfaces of the first conductive conductors 1400 and the top surface ofthe first dielectric layer 1300 are collectively referred to as a firstwafer bonding surface WS1.

The integrated circuit components 200 may include logic dies (e.g.,central processing unit (CPU), graphics processing unit (GPU),microcontroller, etc.), memory dies (e.g., dynamic random access memory(DRAM) dies, static random access memory (SRAM) dies, etc.), powermanagement dies (e.g., power management integrated circuit (PMIC) dies),radio frequency (RF) dies, sensor dies, micro-electro-mechanical-system(MEMS) dies, the like, or a combination thereof. In certain embodiments,the processing, memory, and/or electronic control functionality may beintegrated on the same integrated circuit component. In someembodiments, each integrated circuit component 200 includes asemiconductor substrate 210, at least one through semiconductor via 212formed in the semiconductor substrate 210, an interconnection structure220 formed over the semiconductor substrate 210 and electricallyconnected to the through semiconductor vias 212, a dielectric layer 230formed over the interconnection structure 220, and a plurality of dieconnectors 240 embedded in the dielectric layer 230 and electricallyconnected to the interconnection structure 220. It should be noted thatthe number of through semiconductor vias 212 merely serves as anillustrative example, and the disclosure is not limited thereto.

For example, the semiconductor substrate 210 of the integrated circuitcomponents 200 may be a silicon substrate including active components(e.g., transistors or the like) and/or passive components (e.g.,resistors, capacitors, inductors or the like) formed therein; the dieconnectors 240 may include aluminum pads, copper pads, or other suitablemetal pads; and the dielectric layer 230 may be a silicon oxide layer, asilicon nitride layer, a silicon oxy-nitride layer, or a dielectriclayer formed by other suitable dielectric materials. As referred toherein, the through semiconductor vias 212 of the integrated circuitcomponents 200 are not intended to be limited to any particular type ofelectrically conducting material or any particular method offabrication. Electrically conducting pillars, whether solid or hollow,or other electrically interconnecting structures, that can provideelectrical connection and go through in a thickness direction may beconsidered as the through semiconductor vias 212. The interconnectionstructure 220 of the integrated circuit components 200 formed over thesemiconductor substrate 210 is designed to connect the variouselectrical components to form functional circuitry. For example, theinterconnection structure 220 is formed of alternating layers ofdielectric material and conductive material and may be formed throughany suitable process (e.g., deposition, damascene, dual damascene,etc.).

In some embodiments, the die connectors 240 of the integrated circuitcomponents 200 including conductive pads are partially revealed by theopenings of the dielectric layer 230. In some embodiments, top surfacesof the die conductors 240 and a top surface of the dielectric layer 230are collectively referred to as an active surface AS of each integratedcircuit component 200. For example, each integrated circuit component200 may include the active surface AS, a rear surface RS' opposite tothe active surface AS, and the sidewalls SW connected to the activesurface AS and the rear surface RS′. In some embodiments, the throughsemiconductor vias 212 are not revealed by the rear surface RS' at thisstage. In some embodiments, the top surfaces of the die conductors 240and the top surface of the dielectric layer 230 may be substantiallylocated at the same level height to provide an appropriate activesurface AS for a subsequent bonding process.

In some embodiments, the integrated circuit components 200 arepicked-and-placed onto the first wafer bonding surface WS1 of the firstsemiconductor wafer W1. In some embodiments, a gap G is formed betweentwo adjacent integrated circuit components 200. In some alternativeembodiments, some of the various integrated circuit components 200 maybe directly adjacent one another such that no gap is formed between theintegrated circuit components 200. In other words, the integratedcircuit components 200 may be spaced apart or immediately disposed sideby side. In some embodiments, the integrated circuit components 200 andthe first semiconductor wafer W1 are bonded in a face-to-face alignment.For example, the active surface AS of each integrated circuit component200 and the first wafer bonding surface WS1 of the first semiconductorwafer W1 may be face each other and may be in physical contact with eachother. In some embodiments, the first conductive connectors 1400 of thefirst semiconductor wafer W1 are substantially aligned and in contactwith the die conductors 240 of the integrated circuit components 200.For example, the center of the first conductive connectors 1400 may besubstantially positioned to the center of the die conductors 240. Theintegrated circuit components 200 and the first semiconductor wafer W1are bonded using hybrid bonding, fusion bonding, direct bonding,dielectric bonding, metal bonding, solder joints, or other applicabletechniques, such that the integrated circuit components 200 areelectrically connected to the first semiconductor wafer W1.

For example, the dielectric layers 230 of the integrated circuitcomponents 200 are bonded to the first dielectric layer 1300 of thefirst semiconductor wafer W1 using direct dielectric-to-dielectricbonding, and the die connectors 240 of each integrated circuitcomponents 200 are bonded to the first conductive connectors 1400 of thefirst semiconductor wafer W1 using direct metal-to-metal bonding. Insuch embodiments, covalent bonds are formed with oxide layers, such asthe dielectric layers 230 of the integrated circuit components 200. Insome embodiments, before performing the bonding process, a surfacetreatment may be performed on the integrated circuit components 200.Next, a pre-bonding process may be performed to align the integratedcircuit components 200 with the first semiconductor wafer W1. Forexample, the alignment of the integrated circuit components 200 and thefirst semiconductor wafer W1 may be achieved using optical sensing,alignment marks, or other applicable techniques. Subsequently, theintegrated circuit components 200 and the first semiconductor wafer W1may be pressed against together to form weak bonds at the interfacetherebetween. For example, a pressing force may be applied to press theintegrated circuit components 200 and the first semiconductor wafer W1against one another. In some embodiments, the pre-bonding step may beperformed at the room temperature. In alternative embodiments, highertemperatures may be used during the pre-bonding step.

After the pre-bonding process, the integrated circuit components 200 andthe first semiconductor wafer W1 are treated to strengthen the weakbonds using, for example, an annealing process, other heatingtechniques, or the like. For example, during the annealing process, OHbonds in the dielectric layers 230 of the integrated circuit components200 and the first dielectric layer 1300 of the first semiconductor waferW1 may break to form the strong bonds between the integrated circuitcomponents 200 and the first semiconductor wafer W1, and hence theintegrated circuit components 200 and the first semiconductor wafer W1are bonded to one another through, for example, fusion bonds or Van DerWaals force. In some embodiments, during the hybrid bonding, the metal(e.g., copper) in the die connectors 240 of the integrated circuitcomponents 200 and the first conductive connectors 1400 of the firstsemiconductor wafer W1 may diffuse to each other, so that metal-to-metalbonds also occurs therebetween. Afterwards, the resulting bonds betweenthe integrated circuit components 200 and the first semiconductor waferW1 are hybrid bonds. The dimensions of the die connectors 240 of theintegrated circuit components 200 and the first conductive connectors1400 of the first semiconductor wafer W1 may be similar. For example,widths of the die connectors 240 may be substantially the same as widthof the corresponding first conductive connectors 1400 so that afterbonding, the first conductive connectors 1400 and the corresponding dieconnectors 240 are pitch-matched. In alternative embodiments, thedimensions of the die connectors 240 of the integrated circuitcomponents 200 and the corresponding first conductive connectors 1400 ofthe first semiconductor wafer W1 are different. The dimensions of thedie connectors 240 of the integrated circuit components 200 may begreater than that of the corresponding first conductive connectors 1400of the first semiconductor wafer W1. In alternative embodiments, thedimensions of the first conductive connectors 1400 of the firstsemiconductor wafer W1 may be greater than that of the corresponding dieconnectors 240.

Referring to FIGS. 2 and 3 , after bonding the integrated circuitcomponents 200 with the first semiconductor wafer W1, a dielectricencapsulation layer 3000 is formed on the first semiconductor wafer W1to laterally encapsulate the integrated circuit components 200. In someembodiments, a dielectric material layer 3000′ is formed to cover thefirst semiconductor wafer W1 and each integrated circuit component 200.For example, the dielectric material layer 3000′ is formed over thefirst wafer bonding surface WS1 of the first semiconductor wafer W1 andwraps the integrated circuit components 200. The dielectric materiallayer 3000′ may fill the gaps G between the adjacent integrated circuitcomponents 200 so that the dielectric material layer 3000′ covers thesidewalls SW and the rear surfaces RS' of the integrated circuitcomponents 200. In some embodiments, the dielectric material layer 3000′includes inorganic material (e.g., silicon dioxide, Si—O—N, Si—C—N,Si—C—O, or the like), organic material (e.g., epoxy, polyimide (PI),polybenzoxazole (PBO), or the like), or the mixture of inorganic andorganic materials (e.g., the mixture of silicon dioxide and epoxy, orthe like). The dielectric material layer 3000′ may be referred to as“gap-fill dielectric”. In alternative embodiments, the dielectricmaterial layer 3000′ includes a molding compound, a molding underfill(MUF), a resin, or the like. The dielectric material layer 3000′ may beformed through chemical vapor deposition (CVD), plasma-enhanced chemicalvapor deposition (PECVD), atomic layer deposition (ALD), or othersuitable techniques.

Subsequently, the dielectric material layer 3000′ is partially removedto reveal the integrated circuit components 200 so as to form thedielectric encapsulation 3000. For example, after forming the dielectricmaterial layer 3000′, a planarization process may be performed on thedielectric material layer 3000′. In some embodiments, the planarizationprocess includes a mechanical grinding process and/or a chemicalmechanical polishing (CMP) process, or other applicable processes. Insome embodiments, the planarization process is performed on thedielectric material layer 3000′ and the rear surfaces RS of theintegrated circuit components 200, thereby obtaining a substantiallyplanar surface topography. For example, the dielectric material layer3000′ is grinded to form a top surface 3000 s of the dielectricencapsulation layer 3000 and the rear surfaces RS of the integratedcircuit components 200 is also grinded to form planarized rear surfacesRS. The surface roughness of the planarized rear surfaces RS of theintegrated circuit components 200 and the top surface 3000 s of thedielectric encapsulation layer 3000 may be less than about 0.5 μm. Insome embodiments, the planarized rear surfaces RS of the integratedcircuit components 200 are substantially coplanar with the top surface3000 s of the dielectric encapsulation layer 3000. The integratedcircuit components 200 may be grinded until the through semiconductorvias 212 are revealed by the planarized rear surfaces RS of theintegrated circuit components 200 for further electrical connection.

In some embodiments, after the planarization process, the throughsemiconductor vias 212 may penetrate through the semiconductor substrate210 so that the through semiconductor vias 212 allow electricalcommunication between the front side and the back side of thecorresponding integrated circuit components 200. In some otherembodiments, after the through semiconductor vias 212 are revealed, thesemiconductor substrate 210 of the integrated circuit components 200 maybe further grinded to render desired thicknesses of the integratedcircuit components 200. In some other embodiments, during thinning thedielectric material layer 3000′, the first substrate 1100 of the firstsemiconductor wafer W1 may be thinned at the same time, thereby reducingthe overall thickness of the structure.

Referring to FIG. 4 , a bonding layer 4000 is formed on the integratedcircuit components 200 and the dielectric encapsulation layer 3000. Insome embodiments, the bonding layer 4000 includes a dielectric layer4100 and conductive features 4200 laterally wrapped by the dielectriclayer 4100. For example, a dielectric material (not shown) may be formedover the planarized rear surfaces RS of the integrated circuitcomponents 200 and the top surface 3000 s of the dielectricencapsulation layer 3000 by spin-coating, laminating, or other suitabledeposition techniques. Next, the dielectric material is patterned toform the dielectric layer 4100 having a plurality of openings (notshown) using, for example, lithography and etching processes, or othersuitable methods. The openings of the dielectric layer 4100 may exposeat least a portion of the through semiconductor vias 212 of theintegrated circuit components 200 on the planarized rear surface RS.Subsequently, a conductive material may be formed in the openings of thedielectric layer 4100 so as to form the conductive features 4200 usingplating, sputtering, or other suitable depositing process. Theconductive features 4200 formed on the planarized rear surfaces RS maybe electrically and physically connected to the through semiconductorvias 212 of the integrated circuit components 200 for further electricalconnection. The conductive features 4200 of the bonding layer 4000 maybe formed within the area of the planarized rear surfaces RS. In somealternative embodiments, the conductive features 4200 of the bondinglayer 4000 may be formed to expand wider than the area of the planarizedrear surfaces RS so as to reroute electrical signals of the integratedcircuit components 200.

Referring to FIG. 5 , a second semiconductor wafer W2 is bonded with thebonding layer 4000. In some embodiments, the second semiconductor waferW2 includes a second substrate 5100, at least one second throughsemiconductor via 5120 embedded in the second substrate 5100, a secondinterconnection layer 5200 formed over the second substrate 5100, asecond dielectric layer 5300 formed over the second interconnectionlayer 5200, and a plurality of second conductive connectors 5400embedded in the second dielectric layer 5300. The second substrate 5100may be a silicon wafer, a semiconductor substrate (e.g., a bulksemiconductor which may be doped or undoped), or other suitablesubstrates (e.g., a multi-layered, gradient substrate, etc.). Thesemiconductor material of the second substrate 5100 may be similar withthat of the first substrate 1100 of the first semiconductor wafer W1. Insome embodiments, the second substrate 5100 may include variouselectrical components (e.g., transistors, capacitors, resistors,inductors, combinations of these, or the like) and metallizationpatterns interconnected each other to perform one or more functions.

In some embodiments, the second through semiconductor vias 5120 areformed to extend into the second substrate 5100. For example, the secondthrough semiconductor vias 5120 may be formed by forming recesses in thesecond substrate 5100 by etching, laser drilling, a combination thereof,and/or the like. In some embodiments, a thin dielectric material (notshown) may be formed in the recesses using an oxidation technique or thelike. A barrier layer (not shown) may be conformally deposited over thesecond substrate 5100 and in the recesses by any suitable depositiontechnique. Subsequently, a conductive material may be deposited over thebarrier layer by plating, sputtering, deposition, or the like. Excess ofthe conductive material and barrier layer may be removed from the secondsubstrate 5100 by, for example, a CMP process or the like. The secondthrough semiconductor vias 5120 collectively include the barrier layerand conductive material, with the barrier layer between the conductivematerial and the second substrate 5100. It should be noted that thenumber of second through semiconductor vias 5120 merely serves as anillustrative example, and the disclosure is not limited thereto. In someembodiments, the second through semiconductor vias 5120 penetratethrough the second substrate 5100 and a surface of the second substrate5100 exposes at least a portion of the second through semiconductor vias5120 for further electrical connection. For example, the top surfaces ofthe second through semiconductor vias 5120 are substantially coplanarwith the surface of the second substrate 5100, and the top surfaces ofthe second through semiconductor vias 5120 and the surface of the secondsubstrate 5100 may be collectively referred to as a rear surface RS2 ofthe second semiconductor wafer W2.

In some embodiments, the second interconnection layer 5200 includes aplurality of second conductive patterns 5210 embedded in a seconddielectric material 5220. In some embodiments, the second conductiveconductors 5400 are laterally wrapped by the second dielectric layer5300. The second conductive conductors 5400 may include conductive padselectrically coupled to the second through semiconductor vias 5120through the second interconnection layer 5200. The materials of thesecond conductive conductors 5400 and the second dielectric layer 5300may be similar to that of the first conductive conductors 1400 and thefirst dielectric layer 1300 of the first semiconductor wafer W1. In someembodiments, at least a portion of the second conductive conductors 5400are revealed by the second dielectric layer 5300. For example, the topsurfaces of the second conductive conductors 5400 and the top surface ofthe second dielectric layer 5300 are substantially level and may becollectively referred to as a second wafer bonding surface WS2.

In some embodiments, the second semiconductor wafer W2 is attached tothe bonding layer 4000 by hybrid bonding. For example, a pre-bondingprocess may be performed, where the second wafer bonding surface WS2faces toward the bonding layer 4000 and the second conductive conductors5400 of the second semiconductor wafer W2 and the conductive features4200 of the bonding layer 4000 are aligned. The second semiconductorwafer W2 and the underlying structure are pressed against together toform weak bonds. After the pre-bonding process, an annealing process maybe performed to strengthen the weak bonds and form a fusion bond. Duringthe annealing, the H of the OH bonds is outgassed, thereby formingSi—O—Si bonds between the second semiconductor wafer W2 and theunderlying structure, thereby strengthening the bonds. During the hybridbonding, the direct metal-to-metal bonding may also occur between thesecond conductive conductors 5400 of the second semiconductor wafer W2and the conductive features 4200 of the bonding layer 4000. Accordingly,the resulting bond is a hybrid bond including the Si—O—Si bonds andmetal-to-metal direct bonds. In some embodiments, the bonding of thestructure shown in FIG. 5 may be performed at the wafer-to-die-to-waferlevel.

Referring to FIG. 6 , a plurality of input/output (I/O) terminals 7000are disposed on the second semiconductor wafer W2 and electricallyconnected to the second through semiconductor vias 5120 of the secondsemiconductor wafer W2. In some embodiments, after bonding the secondsemiconductor wafer W2 with the bonding layer 4000, a circuitrystructure 6000 including one or more dielectric layer(s) 6100 andrespective metallization pattern(s) 6200 may be formed over the rearsurface RS2 of the second semiconductor wafer W2. The metallizationpatterns 6200 embedded in the dielectric layer 6100 may be in electricaland physical contact with the second through semiconductor vias 5120 ofthe second semiconductor wafer W2. In some embodiments, themetallization patterns 6200 include under-ball metallurgy (UBM) featuresfor a subsequent terminal mounting process.

In some embodiments, after forming the circuitry structure 6000, the I/Oterminals 7000 are formed on the circuitry structure 6000 toelectrically connect the second semiconductor wafer W2 through themetallization patterns 6200 of the circuitry structure 6000. Forexample, the I/O terminals 7000 are formed on the UBM features of themetallization patterns 6200 through a solder flux. The I/O terminals7000 may be, for example, metal pillars, solder balls, ball grid array(BGA) balls, controlled collapse chip connection (C4) bumps, microbumps, electroless nickel-electroless palladium-immersion gold technique(ENEPIG) formed bumps, combinations thereof, or the like. In someembodiments, the I/O terminals 7000 are made of a conductive materialwith low resistivity, such as Sn, Pb, Ag, Cu, Ni, Bi, or an alloythereof. In some embodiments, the I/O terminals 7000 are formed byinitially forming a layer of solder through such as evaporation,plating, printing, solder transferring, ball placement, or the like.Once a layer of solder has been formed, a reflow may be performed inorder to shape the material into the desired terminal shapes. Inalternative embodiment, the I/O terminals 7000 are metal pillars (e.g.,solder free and have substantially vertical sidewalls) formed bysputtering, printing, plating, or the like. In certain embodiments, ametal cap layer (not shown) is formed on the top of the I/O terminals7000 by a plating process.

In some embodiments, after forming the I/O terminals 7000, a singulationprocess may be performed to cut the first semiconductor wafer W1, thesecond semiconductor wafer W2, and the dielectric encapsulation layer3000. In some embodiments, the singulation process involves dicing witha rotating blade or a laser beam. The dicing or singulation processincludes a laser cutting process, a mechanical cutting process, or othersuitable processes. In some embodiments, during the singulation process,the first semiconductor wafer W1, the second semiconductor wafer W2, andthe dielectric encapsulation layer 3000 may be cut off along scribelines so as to be divided into a plurality of semiconductor devices 10A(as shown in FIG. 7 ).

Referring to FIG. 7 , the semiconductor device 10A includes amulti-leveled IC component stack having at least one discrete die (e.g.,the integrated circuit component 200) packaging therein. In someembodiments, the semiconductor device 10A may be referred to as thesystem on integrated circuit (SoIC) device. For example, thesemiconductor device 10A includes a first integrated circuit component100 (e.g., singulated from the first semiconductor wafer W1), theintegrated circuit component 200 (i.e. second integrated circuitcomponent) stacked on and electrically connected to the first integratedcircuit component 100, a dielectric encapsulation 300 (e.g., singulatedfrom the dielectric encapsulation layer 3000) laterally encapsulatingthe integrated circuit component 200, a bonding layer 400 (e.g.,singulated from the bonding layer 4000) disposed between the integratedcircuit component 200 and a third integrated circuit component 500, thethird integrated circuit component 500 (e.g., singulated from the secondsemiconductor wafer W2) stacked on and electrically connected to theintegrated circuit component 200, a circuit layer 600 (e.g., singulatedfrom the circuitry structure 6000) stacked on the integrated circuitcomponent 200 and electrically connected to the through semiconductorvias 212 of the integrated circuit component 200, and a plurality of I/Oterminals 700 disposed on the third integrated circuit component 500 andelectrically connected to the second through semiconductor vias 512 ofthe third integrated circuit component 500.

In some embodiments, the integrated circuit component 200 and the thirdintegrated circuit component 500 are electrically connected to eachother through the bonding layer 400. The dielectric encapsulation 300may be disposed on the first integrated circuit component 100 and maylaterally encapsulate the integrated circuit component 200, and thethird integrated circuit component 500 may be disposed on the integratedcircuit component 200 and the dielectric encapsulation 300. For example,inner sidewalls IS of the dielectric encapsulation 300 are in contactwith the sidewalls SW of the integrated circuit component 200 such thatthe sidewalls SW of the integrated circuit component 200 are wellprotected. In some embodiments, outer sidewalls OS of the dielectricencapsulation 300 are substantially aligned with sidewalls SW1 of thefirst integrated circuit component 100 and sidewalls SW3 of the thirdintegrated circuit component 500. The integrated circuit component 200may include the through semiconductor vias 212 and the third integratedcircuit component 500 may include second through semiconductor vias 512electrically connected to the through semiconductor vias 212 of theintegrated circuit component 200.

FIG. 8 is a schematic cross-sectional view showing an application of asemiconductor device according to some exemplary embodiments of thepresent disclosure. Referring to FIG. 8 , an electronic device EDincluding the semiconductor device 10A packaged therein is provided. Forexample, the electronic device ED includes at least a first packagestructure P1. In some embodiments, the first package structure P1includes the semiconductor device 10A wrapped by an insultingencapsulation 20, a redistribution structure 30 formed over thesemiconductor device 10A and the insulating encapsulation 20, and aplurality of conductive terminals 40 formed over the redistributionstructure 30 for further electrical connection. The insultingencapsulation 20 may be a molding compound, epoxy resins, or the like,and may be formed by compression molding, transfer molding, or the like.The redistribution structure 30 may be formed of alternating layers ofdielectric material 32 and conductive material 34 with viasinterconnecting the layers of conductive material 34 and may be formedthrough suitable deposition, patterning and metallization techniques.The conductive terminals 40 connected to the conductive material 34 ofthe redistribution structure 30 may be ball grid array (BGA) terminals,solder balls, or the like. In some embodiments, the first packagestructure P1 further includes at least one through insulating via TIVembedded in the insulating encapsulation 20 and aside the semiconductordevice 10A for further electrical stacking. In some embodiments, thefirst package structure P1 is referred to as an integrated fan-out(InFO) package structure.

In some embodiments, the electronic device ED further includes a secondpackage structure P2 stacked on the first package structure P1 so as toform a package-on-package (PoP) structure. In some embodiments, aplurality of external terminals P2 a of the second package structure P2are in electrical and physical contact with the through insulating viasTIV of the first package structure P1. The second package structure P2may be electrically coupled to the semiconductor device 10A through thethrough insulating vias TIV and the redistribution structure 30. In someembodiments, the second package structure P2 includes at least onesemiconductor die (not shown) having the processing, memory, electroniccontrol, and/or other functionalities. In some embodiments, an underfillUF is formed between the first package structure P1 and the secondpackage structure P2 to encapsulate the external terminals P2 a. Forexample, the underfill UF may be made of a liquid epoxy that isdispensed between the first package structure P1 and the second packagestructure P2, and then cured to harden. In alternative embodiments, nounderfill is used.

In some embodiments, the electronic device ED further includes a packagecomponent P3 connected to the conductive terminals 40 of the firstpackage structure P1. The semiconductor device 10A of the first packagestructure P1 may be electrically coupled to the second package structureP2 and the package component P3. For example, the package component P3is a printed circuit board (PCB), such as a single-layer PCB or amultiple-layer PCB. In some embodiments, metallic interconnects (notshown) may be formed in/on the package component P3, and areelectrically coupled to the conductive terminals 40 of the first packagestructure P1. In some other embodiments, the package component P3includes a device package, an interposer, or any other types of packagecomponent. It should be appreciated that the above examples are providedfor illustrative purposes, and other embodiments may utilize fewer oradditional elements. In addition, other package structure/component maybe used as appropriate for a given application.

FIGS. 9 through 12 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure. The identical orsimilar numbers will be denoted by the identical or similar elementsthroughout the drawings, and detail thereof is not repeated. Referringto FIG. 9 , the integrated circuit components 200 are bonded with afirst semiconductor wafer W1′. The first semiconductor wafer W1′ may besimilar to the first semiconductor wafer W1 shown in FIG. 1 and thedifferences lie in that the first semiconductor wafer W1′ includes aplurality of first through semiconductor vias 1120 embedded in the firstsubstrate 1100′.

For example, the first substrate 1100′ is provided with a plurality ofopenings (not shown) and a conductive material is formed therein,thereby forming the first through semiconductor vias 1120 in the firstsubstrate 1100′. The openings of the first substrate 1100′ may or maynot penetrate through the first substrate 1100′. In some embodiments, aliner (e.g., a diffusion barrier layer, an adhesion layer, or the like;not shown) may be formed inside the openings of the first substrate1100′ by a deposition process or other suitable techniques. Next, a seedlayer (not shown), which may include copper or a copper alloy, may bedeposited inside the openings of the first substrate 1100′, and then theconductive material may be formed inside the openings using, forexample, plating or other suitable techniques. The conductive materialmay be a metallic material including a metal or a metal alloy such ascopper, silver, gold, tungsten, cobalt, aluminum, or alloys thereof. Aplanarization process is optionally performed to remove excessconductive material such that top surfaces of the first throughsemiconductor vias 1120 and the first substrate 1100′ are substantiallycoplanar. The first interconnection layer 1200 is then formed over thefirst substrate 1100′ and the first through semiconductor vias 1120 suchthat the first interconnection layer 1200 is electrically connected tothe first through semiconductor vias 1120. Subsequently, the firstdielectric layer 1300 and the first conductive connectors 1400 areformed over the first interconnection layer 1200 and the firstconductive connectors 1400 are electrically connected to the firstthrough semiconductor vias 1120 through the first interconnection layer1200. The first semiconductor wafer W1′ may include the first waferbonding surface WS1 and a back surface BS1 opposite to the first waferbonding surface WS1. In some embodiments, the first throughsemiconductor vias 1120 do not penetrate through the first substrate1100′ at this stage, so that the first through semiconductor vias 1120are not exposed by the back surface BS1. One end of each first throughsemiconductor via 1120 is in physical and electrical contact with thefirst interconnection layer 1200 and the opposite end of each firstthrough semiconductor via 1120 is buried inside the first substrate1100′.

In some embodiments, the integrated circuit components 200 are bonded tothe first wafer bonding surface WS1 of the first semiconductor wafer W1′using, for example, hybrid bonding, or other applicable techniques.After bonding, the integrated circuit components 200 distributed on thefirst wafer bonding surface WS1 may be separated from one another, suchthat the gaps G are formed between two adjacent integrated circuitcomponents 200. In some embodiments, the first conductive connectors1400 of the first semiconductor wafer W1′ are substantially aligned andin direct contact with the die conductors 240 of the integrated circuitcomponents 200.

Referring to FIG. 10 , after bonding the integrated circuit components200 with the first semiconductor wafer W1, the dielectric encapsulationlayer 3000 is formed over the first semiconductor wafer W1′ to laterallyencapsulate the integrated circuit components 200. The dielectricencapsulation layer 3000 in FIG. 10 may be similar to the dielectricencapsulation layer 3000 described in FIG. 3 , so the detaileddescriptions are omitted herein. In some embodiments, the dielectricencapsulation layer 3000 fills the gaps G between two adjacentintegrated circuit components 200 and covers the sidewalls SW of eachintegrated circuit component 200 for protection. In some embodiments, atleast a portion of the through semiconductor vias 212 of the integratedcircuit components 200 may be exposed by the planarized rear surfaces RSfor further electrical connection. The planarized rear surfaces RS ofthe integrated circuit components 200 and the top surface 3000 s of thedielectric encapsulation layer 3000 may be substantially coplanar. Insome alternative embodiments, when the dielectric material layer 3000′is partially removed to reveal the integrated circuit components 200 soas to form the dielectric encapsulation layer 3000, the first substrate1100′ of the first semiconductor wafer W1′ may also be thinned until thefirst through semiconductor vias 1120 are revealed by the back surfaceBS1 of the first semiconductor wafer W1′ for further electricalconnection.

Referring to FIG. 11 , a bonding layer 4000 is formed over theintegrated circuit components 200 and the dielectric encapsulation layer3000 and a second semiconductor wafer W2′ is bonded with the bondinglayer 4000. The bonding layer 4000 including the dielectric layer 4100and the conductive features 4200 may be similar to the bonding layer4000 shown in FIG. 4 , and the detailed descriptions are omitted forbrevity. After forming the bonding layer 4000, the second semiconductorwafer W2′ is attached to the bonding layer 4000 through hybrid bonding.The second semiconductor wafer W2′ in FIG. 11 may be similar to thesecond semiconductor wafer W2 described in FIG. 5 and the differencetherebetween lies in that the second semiconductor wafer W2′ is free ofthe through semiconductor vias in the second substrate 5100′.

Referring to FIG. 12 , the first through semiconductor vias 1120 of thefirst semiconductor wafer W1′ is exposed by the back surface BS1 and aplurality of I/O terminals 7000 are disposed on the first semiconductorwafer W1′ and electrically coupled to the first through semiconductorvias 1120. After bonding the second semiconductor wafer W2, thestructure is optionally overturned (e.g., flipped upside down) forfurther processing onto the back surface BS1 of the first semiconductorwafer W1′. The first substrate 1100′ may be thinned until the firstthrough semiconductor vias 1120 are revealed by the back surface BS1 ofthe first semiconductor wafer W1′ using a mechanical grinding processand/or a CMP process, or other suitable processes. In some embodiments,after exposing the first through semiconductor vias 1120, a circuitrystructure 6000′ including the dielectric layer 6100′ and themetallization patterns 6200′ may be formed over the back surface BS1 ofthe first semiconductor wafer W1′. The metallization patterns 6200′embedded in the dielectric layer 6100′ may be in electrical and physicalcontact with the first through semiconductor vias 1120 of the firstsemiconductor wafer W1′. The metallization patterns 6200′ may includeUBM features for mounting I/O terminals 7000. After formation, asingulation process is performed on the structure along the scribe linesto obtain a plurality of semiconductor devices 10B (shown in FIG. 12 ).

Referring to FIG. 13 , the semiconductor device 10B includes a firstintegrated circuit component 100′ (e.g., singulated from the firstsemiconductor wafer W1′), the integrated circuit component 200 (i.e.second integrated circuit component) stacked on and electricallyconnected to the first integrated circuit component 100′, a dielectricencapsulation 300 (e.g., singulated from the dielectric encapsulationlayer 3000) laterally encapsulating the integrated circuit component200, a bonding layer 400 (e.g., singulated from the bonding layer 4000)disposed between the integrated circuit component 200 and a thirdintegrated circuit component 500′, the third integrated circuitcomponent 500′ (e.g., singulated from the second semiconductor waferW2′) stacked on and electrically connected to the integrated circuitcomponent 200, a circuit layer 600′ (e.g., singulated from the circuitrystructure 6000′) stacked on the first integrated circuit component 100′and electrically connected to the first through semiconductor vias 112of the first integrated circuit component 100′, and a plurality of I/Oterminals 700 disposed on the circuit layer 600′ and electricallyconnected to the first through semiconductor vias 112 of the firstintegrated circuit component 100′ through the circuit layer 600′. Insome embodiments, the first through semiconductor vias 112 of the firstintegrated circuit component 100′ and the through semiconductor vias 212of the integrated circuit component 200 are electrically connected. Thesemiconductor device 10B may perform a variety of electrical functionsnecessary for different applications. It should be appreciated that thesemiconductor device 10B can further be packaged to form apackage-on-package (PoP) structure or system-in-package (SiP) structureusing suitable packaging techniques. The applications of thesemiconductor device 10B are not limited in the disclosure.

FIGS. 14 through 18 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure. Referring to FIG.14 , the bonding may be at wafer-to-wafer level, for example, the firstsemiconductor wafer W1 is bonded with the second semiconductor wafer W2.In some embodiments, the first wafer bonding surface WS1 of the firstsemiconductor wafer W1 is immediately in contact with the second waferbonding surface WS2 of the second semiconductor wafer W2. For example,the bonding of the second semiconductor wafer W2 to the firstsemiconductor wafer W1 is achieved by aligning the second conductiveconnectors 5400 with the first conductive conductors 1400. In someembodiments, pressure is applied to the first semiconductor wafer W1 andthe second semiconductor wafer W2 to form a bond therebetween. Forexample, after the first dielectric layer 1300 and the second dielectriclayer 5300 are bonded with a dielectric-to-dielectric bond, the firstconductive connectors 1400 and the second conductive conductors 5400 arebonded with a metal-to-metal bond. In some embodiments, the heat may beapplied using a thermal anneal process or other heating techniques tostrengthen the bonding. In some embodiments, the first semiconductorwafer W1 may be free of through semiconductor vias in the firstsubstrate 1100, while the second semiconductor wafer W2 may include aplurality of second through semiconductor vias 5120 penetrating throughthe second substrate 5100.

Subsequently, a bonding layer 4000′ may be formed on the secondsemiconductor wafer W2 opposite to the first semiconductor wafer W1. Forexample, a dielectric material (not shown) may be formed over the secondsemiconductor wafer W2, and the dielectric material is patterned to formthe dielectric layer 4100 having a plurality of openings (notillustrated) using lithography and etching or other suitable process.The openings of the dielectric layer 4100 may expose at least a portionof the second through semiconductor vias 5120. Next, the conductivefeatures 4200 may be deposited in the openings of the dielectric layer4100 to form the bonding layer 4000′ over the second semiconductor waferW2 for further electrical stacking.

Referring to FIG. 15 , the integrated circuit components 200 are bondedwith the second semiconductor wafer W2 through the bonding layer 4000′.In some embodiments, the integrated circuit components 200 are pickedand placed on the bonding layer 4000′, and the die conductors 240 of theintegrated circuit components 200 may be aligned with the conductivefeatures 4200 of the bonding layer 4000′. After the alignment process,the integrated circuit components 200 and the bonding layer 4000′ may behybrid bonded together by, for example, applying pressure and heat orother suitable methods. Afterwards, the dielectric layers 230 of theintegrated circuit components 200 and the dielectric layer 4100 of thebonding layer 4000′ are bonded with a dielectric-to-dielectric bond,while the die conductors 240 of the integrated circuit components 200and the conductive features 4200 of the bonding layer 4000′ are bondedwith a metal-to-metal bond. The die conductors 240 of the integratedcircuit components 200 are electrically connected to the second throughsemiconductor vias 5120 of the second semiconductor wafer W2 through theconductive features 4200 of the bonding layer 4000′.

Referring to FIG. 16 , a dielectric encapsulation layer 3000 is formedover the second semiconductor wafer W2 to laterally encapsulate theintegrated circuit components 200. In some embodiments, after bondingthe integrated circuit components 200 and the second semiconductor waferW2 through the bonding layer 4000′, the dielectric encapsulation layer3000 is formed on the bonding layer 4000′ to encapsulate the integratedcircuit components 200 such that the dielectric encapsulation layer 3000covers the sidewalls SW of each integrated circuit component 200 andalso in contact with the dielectric layer 4100. In some embodiments, thethrough semiconductor vias 212 of the integrated circuit components 200are not revealed from the semiconductor substrate 210 during the bondingprocess, and after forming the dielectric encapsulation layer 3000, thethrough semiconductor vias 212 of the integrated circuit components 200are exposed by the planarized rear surfaces RS and the dielectricencapsulation layer 3000. The formation of the dielectric encapsulationlayer 3000 may be similar to that of the dielectric encapsulation layer3000 shown in FIG. 3 , and the detailed descriptions are omitted forbrevity. In some embodiments, the bonding of the structure shown in FIG.16 may be performed at the wafer-to-wafer-to-die level.

Referring to FIG. 17 , the I/O terminals 7000 are formed on theintegrated circuit components 200 and electrically connected to thethrough semiconductor vias 212 of the integrated circuit components 200.In some embodiments, a circuit structure 6000″ including the dielectriclayer 6100″ and the metallization patterns 6200″ may be formed over theplanarized rear surfaces RS of the integrated circuit components 200 andthe top surface 3000 s of the dielectric encapsulation layer 3000. Themetallization patterns 6200″ may be in electrical and physical contactwith the through semiconductor vias 212 of the integrated circuitcomponents 200. After forming the circuit structure 6000″, the I/Oterminals 7000 may be formed on the metallization patterns 6200″ of thecircuit structure 6000″ so that the I/O terminals 7000 are electricallycoupled to the underlying integrated circuit components 200, the secondsemiconductor wafer W2, and the first semiconductor wafer W1. Theformation of the circuit structure 6000″ and the I/O terminals 7000 maybe respectively similar to that of the circuit structure 6000 and theI/O terminals 7000 described in FIG. 6 , and the detailed descriptionsare omitted for brevity. Afterwards, a singulation process may beperformed to cut the first semiconductor wafer W1, the secondsemiconductor wafer W2, and the dielectric encapsulation layer 3000along the scribe lines to form a plurality of semiconductor devices 10C(shown in FIG. 18 ).

Referring to FIG. 18 , the semiconductor device 10C includes a firstintegrated circuit component 100″ (e.g., singulated from the firstsemiconductor wafer W1), a second integrated circuit component 500″(e.g., singulated from the second semiconductor wafer W2) stacked on andelectrically connected to the first integrated circuit component 100″,the integrated circuit component 200 (i.e. third integrated circuitcomponent) stacked on and electrically connected to the secondintegrated circuit component 500″, a dielectric encapsulation 300 (e.g.,singulated from the dielectric encapsulation layer 3000) laterallyencapsulating the integrated circuit component 200, a bonding layer 400′(e.g., singulated from the bonding layer 4000′) disposed between theintegrated circuit component 200 and the second integrated circuitcomponent 500″, a circuit layer 600″ (e.g., singulated from thecircuitry structure 6000″) stacked on the integrated circuit component200 and the dielectric encapsulation 300 and electrically connected tothe through semiconductor vias 212 of the integrated circuit component200, and a plurality of I/O terminals 700 disposed on the integratedcircuit component 200 and electrically connected to the throughsemiconductor vias 212 of the integrated circuit component 200 throughthe circuit layer 600″.

In some embodiments, the second integrated circuit component 500″ iscovered by the integrated circuit component 200 and the dielectricencapsulation 300. In some embodiments, the inner sidewalls IS of thedielectric encapsulation 300 are in contact with the sidewalls SW of theintegrated circuit component 200, and the outer sidewalls OS of thedielectric encapsulation 300 are substantially aligned with thesidewalls SW1 of the first integrated circuit component and thesidewalls SW2 of the second integrated circuit component 500″. In someembodiments, the second integrated circuit component 500″ includes aplurality of second through semiconductor vias 512 and the integratedcircuit component 200 includes a plurality of through semiconductor vias212 electrically connected to the second through semiconductor vias 512.It should be appreciated that the semiconductor device 10C can furtherbe packaged to form a package-on-package (PoP) structure,system-in-package (SiP) structure, or form other types of electronicapplications using suitable packaging techniques.

FIGS. 19 through 22 are schematic cross-sectional views showing variousstages in a manufacturing method of a semiconductor device according tosome exemplary embodiments of the present disclosure. Referring to FIG.19 , the bonding may be at wafer level, for example, the firstsemiconductor wafer W1′ is bonded with the second semiconductor waferW2. The bonding layer 4000′ may be formed on the second semiconductorwafer W2 opposite to the first semiconductor wafer W1′. The structureshown in FIG. 19 may be similar to the structure illustrated in FIG. 14, and the difference therebetween lies in that the first semiconductorwafer W1′ includes a plurality of the first through semiconductor vias1120 embedded in the first substrate 1100′. The first semiconductorwafer W1′ in FIG. 19 may be similar to the first semiconductor wafer W1′described in FIG. 9 , so the detailed descriptions are omitted forbrevity.

Referring to FIG. 20 , a plurality of integrated circuit components 200is bonded with the second semiconductor wafer W2 through the bondinglayer 4000′ and a dielectric encapsulation layer 3000 is formed over thesecond semiconductor wafer W2 to laterally encapsulate the integratedcircuit components 200. The bonding process of the integrated circuitcomponents 200 and the forming process of the dielectric encapsulationlayer 3000 may be similar to the processes described in FIGS. 15 and 16, so the detailed descriptions are simplified for brevity. In someembodiments, the integrated circuit components 200 are bonded with thebonding layer 4000′ using, for example, a hybrid bonding technique. Thedielectric layers 230 of the integrated circuit components 200 and thedielectric layer 4100 of the bonding layer 4000′ may be bonded with eachother, while the die conductors 240 of the integrated circuit components200 and the conductive features 4200 of the bonding layer 4000′ arebonded together. The die conductors 240 of the integrated circuitcomponents 200 are electrically connected to the second throughsemiconductor vias 5120 of the second semiconductor wafer W2 through theconductive features 4200 of the bonding layer 4000′. Subsequently, thedielectric encapsulation layer 3000 is formed over the bonding layer4000′ so that the dielectric encapsulation layer 3000 encapsulates theintegrated circuit components 200 and also in contact with thedielectric layer 4100. In some embodiments, when reducing the thicknessof the dielectric material layer 3000′ (as shown in FIG. 2 ) to exposethe through semiconductor vias 212 of the integrated circuit components200, the first substrate 1100′ may also be thinned until the firstthrough semiconductor vias 1120 are revealed by the back surface BS1 ofthe first semiconductor wafer W1′ for further electrical connection. Inalternative embodiments, after forming the dielectric material layer3000′, the planarization process is skipped so that the dielectricmaterial layer 3000′ can protect the sidewalls SW and also the back sideof the integrated circuit components 200.

Referring to FIG. 21 , after the first through semiconductor vias 1120are revealed, the circuit structure 6000′ and the I/O terminals 7000 areformed over the first semiconductor wafer W1′. The forming processes ofthe circuit structure 6000′ and the I/O terminals 7000 may be similar tothat of the circuit structure 6000′ and the I/O terminals 7000respectively described in FIG. 12 , and the detailed descriptions areomitted for brevity. After formation, a singulation process may beperformed on the structure along the scribe lines to obtain a pluralityof semiconductor devices 10D (shown in FIG. 22 ).

Referring to FIG. 22 , the semiconductor device 10D includes a firstintegrated circuit component 100′ (e.g., singulated from the firstsemiconductor wafer W1′), the second integrated circuit component 500″(e.g., singulated from the second semiconductor wafer W2′) stacked onand electrically connected to the first integrated circuit component100′, an integrated circuit component 200 (i.e. third integrated circuitcomponent) stacked on and electrically connected to the first integratedcircuit component 100, a dielectric encapsulation 300 (e.g., singulatedfrom the dielectric encapsulation layer 3000) disposed on the secondintegrated circuit component 500″ and laterally encapsulating theintegrated circuit component 200, a bonding layer 400′ (e.g., singulatedfrom the bonding layer 4000′) disposed between the integrated circuitcomponent 200 and a second integrated circuit component 500″, a circuitlayer 600′ (e.g., singulated from the circuitry structure 6000′) stackedon the first integrated circuit component 100′ and electricallyconnected to the first through semiconductor vias 112 of the firstintegrated circuit component 100′, and a plurality of I/O terminals 700disposed on the circuit layer 600′ and electrically connected to thefirst through semiconductor vias 112 of the first integrated circuitcomponent 100′ through the circuit layer 600′.

In some embodiments, the second integrated circuit component 500″ iscovered by the integrated circuit component 200 and the dielectricencapsulation 300. In some embodiments, the inner sidewalls IS of thedielectric encapsulation 300 are in contact with the sidewalls SW of theintegrated circuit component 200, and the outer sidewalls OS of thedielectric encapsulation 300 are substantially aligned with thesidewalls SW1 of the first integrated circuit component and thesidewalls SW2 of the second integrated circuit component 500″. In someembodiments, the first integrated circuit component 100′ includes aplurality of first through semiconductor vias 112 and the secondintegrated circuit component 500″ includes a plurality of second throughsemiconductor vias 512 electrically connected to the first throughsemiconductor vias 112. The integrated circuit component 200 may includea plurality of through semiconductor vias 212 electrically connected tothe second through semiconductor vias 512. That is, each level of theintegrated circuit components may include through semiconductor viaselectrically connected to one another. It should be appreciated that thesemiconductor device 10D can further be packaged to form apackage-on-package (PoP) structure, system-in-package (SiP) structure,or other types of electronic applications using suitable packagingtechniques. The applications of the semiconductor device 10D are notlimited in the disclosure.

By employing hybrid bonding methods described herein, the semiconductordevice (including multi-layered stacking structure or 3D IC structure)can be obtained with smaller size (e.g., reduced footprint andthickness), lesser weight, relatively easier assembly process, loweroverall production costs, and improvement in electrical performance. Thehybrid bonding methods described herein are compatible with variousprocesses at different level (e.g., wafer-to-wafer level, die-to-waferlevel, die-to-die level, etc.) and materials. In some embodiments, byplanarizing the dielectric material layer and the rear surfaces of theintegrated circuit components, negative impacts of topography created inthe multilevel wafer fabrication process can be eliminated so as torender a planarized surface with minimal layer thickness variation forfurther stacking/bonding processes. In some embodiments, since the innersidewalls of the dielectric encapsulation are in direct contact with thesidewalls of the integrated circuit component (e.g., 200 labeled in FIG.7 ), the sidewalls of the integrated circuit component are wellprotected from external impacts.

In accordance with some embodiments of the disclosure, a semiconductordevice including a first integrated circuit component, a secondintegrated circuit component, a third integrated circuit component, anda dielectric encapsulation is provided. The second integrated circuitcomponent is stacked on and electrically coupled to the first integratedcircuit component, and the third integrated circuit component is stackedon and electrically coupled to the second integrated circuit component.The dielectric encapsulation is disposed on the second integratedcircuit component and laterally encapsulating the third integratedcircuit component, where outer sidewalls of the dielectric encapsulationare substantially aligned with sidewalls of the first and secondintegrated circuit components.

In accordance with some embodiments of the disclosure, a semiconductordevice including a first integrated circuit component, a secondintegrated circuit component, a third integrated circuit component, anda dielectric encapsulation is provided. The first integrated circuitcomponent includes a first bonding structure. The second integratedcircuit component is stacked on and electrically coupled to the firstintegrated circuit component, the second integrated circuit componentincludes a second bonding structure bonded to the first bondingstructure, where each of the first bonding structure and the secondbonding structure includes a plurality of first conductive featureslaterally covered by a first dielectric layer, and bonding surfaces ofthe first conductive features are substantially leveled with a bondingsurface of the first dielectric layer. The third integrated circuitcomponent is stacked on and electrically coupled to the secondintegrated circuit component, and the dielectric encapsulation isdisposed on the third bonding structure of the second integrated circuitcomponent and extends along a sidewall of the third integrated circuitcomponent.

In accordance with some embodiments of the disclosure, a manufacturingmethod of a semiconductor device includes at least the following steps.A second semiconductor wafer is bonded to a first semiconductor wafer. Aplurality of top integrated circuit components is bonded to the secondsemiconductor wafer. A dielectric material layer is formed on the secondsemiconductor wafer to cover the top integrated circuit components. Asingulation process is performed to cut off the dielectric materiallayer, the second semiconductor wafer, and the first semiconductor waferto form a dielectric encapsulation, a middle integrated circuitcomponent underlying the dielectric encapsulation, and a bottomintegrated circuit component underlying the middle integrated circuitcomponent, where outer sidewalls of the dielectric encapsulation aresubstantially aligned with sidewalls of the middle and bottom integratedcircuit components.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device, comprising: a firstintegrated circuit component; a second integrated circuit componentstacked on and electrically coupled to the first integrated circuitcomponent, wherein the first integrated circuit component is in contactwith the second integrated circuit component; a third integrated circuitcomponent stacked on and electrically coupled to the second integratedcircuit component; and a dielectric encapsulation disposed on the secondintegrated circuit component and laterally encapsulating the thirdintegrated circuit component, wherein outer sidewalls of the dielectricencapsulation are substantially aligned with sidewalls of the first andsecond integrated circuit components.
 2. The semiconductor device asclaimed in claim 1, wherein: the first integrated circuit componentcomprises a plurality of first conductive connectors laterally coveredby a first dielectric layer, the second integrated circuit componentcomprises a plurality of second conductive connectors laterally coveredby a second dielectric layer, and each of the first conductiveconnectors is bonded to one of the second conductive connectors, and thefirst dielectric layer is bonded to the second dielectric layer.
 3. Thesemiconductor device as claimed in claim 2, wherein: a bonding surfaceof the first dielectric layer is substantially leveled with bondingsurfaces of the first conductive connectors, and a bonding surface ofthe second dielectric layer is substantially leveled with bondingsurfaces of the second conductive connectors.
 4. The semiconductordevice as claimed in claim 1, wherein the second integrated circuitcomponent comprises: a semiconductor substrate; a plurality of throughsemiconductor vias penetrating through the semiconductor substrate; afirst bonding structure disposed below the semiconductor substrate andelectrically coupled to the first integrated circuit component; aninterconnect structure interposed between the semiconductor substrateand the first bonding structure, the interconnect structure beingelectrically coupled to the through semiconductor vias and the firstbonding structure; and a second bonding structure disposed over thesemiconductor substrate and electrically coupled to the third integratedcircuit component.
 5. The semiconductor device as claimed in claim 4,wherein the second bonding structure of the second integrated circuitcomponent comprises: a plurality of conductive features disposed overthe semiconductor substrate, the conductive features being electricallycoupled to the through semiconductor vias and the third integratedcircuit component; and a dielectric layer disposed over thesemiconductor substrate and laterally covering the conductive features,wherein the dielectric encapsulation is in direct contact with thedielectric layer.
 6. The semiconductor device as claimed in claim 1,wherein the third integrated circuit component comprises: asemiconductor substrate; a bonding structure bonded to the secondintegrated circuit component and comprising a substantially flat bondingsurface; and an interconnect structure interposed between thesemiconductor substrate and the bonding structure, the interconnectstructure being electrically coupled to the bonding structure.
 7. Thesemiconductor device as claimed in claim 6, wherein: the thirdintegrated circuit component further comprises a plurality of throughsemiconductor vias penetrating through the semiconductor substrate andelectrically coupled to the bonding structure, and the semiconductordevice further comprises a plurality of input/output terminals disposedon the semiconductor substrate of the third integrated circuit componentand electrically coupled to the through semiconductor vias of the thirdintegrated circuit component.
 8. The semiconductor device as claimed inclaim 6, wherein the substantially flat bonding surface of the bondingstructure of the third integrated circuit component is bonded to aportion of a bonding surface of the second integrated circuit component,and a rest portion of the bonding surface of the second integratedcircuit component is physically bonded to the dielectric encapsulation.9. The semiconductor device as claimed in claim 1, wherein: the firstintegrated circuit component comprises a semiconductor substrate and aplurality of through semiconductor vias penetrating through thesemiconductor substrate, and the semiconductor device further comprisesa plurality of input/output terminals disposed below the semiconductorsubstrate of the first integrated circuit component and electricallycoupled to the through semiconductor vias of the first integratedcircuit component.
 10. A semiconductor device, comprising: a firstintegrated circuit component comprising a first bonding structure; asecond integrated circuit component stacked on and electrically coupledto the first integrated circuit component, the second integrated circuitcomponent comprising a second bonding structure bonded to the firstbonding structure, wherein each of the first bonding structure and thesecond bonding structure comprises a plurality of first conductivefeatures laterally covered by a first dielectric layer, and bondingsurfaces of the first conductive features are substantially leveled witha bonding surface of the first dielectric layer; a third integratedcircuit component stacked on and electrically coupled to the secondintegrated circuit component; and a dielectric encapsulation disposed ona third bonding structure of the second integrated circuit component andextending along a sidewall of the third integrated circuit component.11. The semiconductor device as claimed in claim 10, wherein outersidewalls of the dielectric encapsulation are substantially leveled withsidewalls of the first and second integrated circuit components.
 12. Thesemiconductor device as claimed in claim 10, wherein: the third bondingstructure is disposed above the second bonding structure, and the thirdintegrated circuit component comprises a fourth bonding structure bondedto the third bonding structure, wherein each of the third bondingstructure and the fourth bonding structure comprises a plurality ofsecond conductive features laterally covered by a second dielectriclayer, and bonding surfaces of the second conductive features aresubstantially leveled with a bonding surface of the second dielectriclayer.
 13. The semiconductor device as claimed in claim 10, wherein: thefirst integrated circuit component comprises a first semiconductorsubstrate and a first interconnect structure disposed on the firstsemiconductor substrate, and the first bonding structure is disposed onand electrically coupled to the first interconnect structure, and thesecond integrated circuit component comprises a second semiconductorsubstrate and a second interconnect structure disposed below the secondsemiconductor substrate, and the second bonding structure bonded to thefirst bonding structure is disposed below and electrically coupled tothe second interconnect structure.
 14. The semiconductor device asclaimed in claim 13, wherein: the second integrated circuit componentfurther comprises a plurality of through semiconductor vias penetratingthrough the second semiconductor substrate and electrically connectingthe second interconnect structure to the third integrated circuitcomponent.
 15. The semiconductor device as claimed in claim 10, wherein:the third integrated circuit component comprises a third semiconductorsubstrate, a third interconnect structure disposed below the thirdsemiconductor substrate, and a plurality of through semiconductor viaspenetrating through the third semiconductor substrate, and thesemiconductor device further comprises a plurality of input/outputterminals disposed over the third semiconductor substrate of the thirdintegrated circuit component and electrically coupled to the throughsemiconductor vias.
 16. The semiconductor device as claimed in claim 10,further comprising: a plurality of input/output terminals disposed belowand electrically coupled to the first integrated circuit component. 17.A manufacturing method of a semiconductor device, comprising: bonding asecond semiconductor wafer to a first semiconductor wafer; bonding aplurality of top integrated circuit components to the secondsemiconductor wafer; forming a dielectric material layer on the secondsemiconductor wafer to cover the top integrated circuit components; andperforming a singulation process to cut off the dielectric materiallayer, the second semiconductor wafer, and the first semiconductor waferto form a dielectric encapsulation, a middle integrated circuitcomponent underlying the dielectric encapsulation, and a bottomintegrated circuit component underlying the middle integrated circuitcomponent, wherein outer sidewalls of the dielectric encapsulation aresubstantially aligned with sidewalls of the middle and bottom integratedcircuit components, wherein the bottom integrated circuit component isin contact with the middle integrated circuit component.
 18. Themanufacturing method as claimed in claim 17, wherein bonding the secondsemiconductor wafer to the first semiconductor wafer comprises: aligninga bonding surface of the second semiconductor wafer to a bonding surfaceof the first semiconductor wafer, wherein the bonding surfaces of thefirst and second semiconductor wafers are substantially flat; andbonding conductive features on the bonding surfaces of the first andsecond semiconductor wafers.
 19. The manufacturing method as claimed inclaim 17, further comprising: forming a plurality of input/outputterminals on the top integrated circuit components to be electricallycoupled to through semiconductor vias of the top integrated circuitcomponents before performing the singulation process.
 20. Themanufacturing method as claimed in claim 17, further comprising:performing a back-side removal process to reveal through semiconductorvias of the first semiconductor wafer; and forming a plurality ofinput/output terminals on the first semiconductor wafer to beelectrically coupled to the through semiconductor vias of the firstsemiconductor wafer before performing the singulation process.